教师名录

幸研教授博士生导师
所在院系:机械制造及自动化系
办公室:机械楼413
电话:52098413
邮箱:xingyan@seu.edu.cn
个人简介

毕业于威澳门尼斯人网站,并攻读硕士博士,于2005-2007年在日本名古屋大学微纳系统工程系从事博士后工作,现为澳门威澳门威斯人网站教授、博士生导师。

   入选江苏省“333”人才,在江苏省微纳医疗器械设计与制造重点实验室从事MEMS/NEMS微纳结构设计与工艺、智能装备设计制造及自动化、精密加工方面的研究工作。目前主持承担了多项国家级、省级及企业科研项目。在束流微纳米结构加工方法,MEMS工艺模型和复杂仿真算法,精密成形工艺及装备、先进制造技术方向取得研究进展。


学习经历
工作经历

2010年-现在,威澳门尼斯人网站 教授、博士生导师

2005年-2007年,日本 名古屋大学(Nagoya University)微纳系统工程系 博士后研究

1996年-2009年,威澳门尼斯人网站 副教授、讲师、助教、硕士生导师

2000年-2000, 加拿大 Concordia大学访问学者


教授课程

本科生基础课“算法语言与程序设计 C++”


研究生学位课“智能制造系统”

研究方向
微纳米结构加工方法、MEMS工艺模型和复杂仿真算法、精密成形工艺及装备、先进制造技术;
审稿期刊

IEEE Journal Of MicroelectromechanicalSystem (JMEMS);

Sensors and Actuators

ACS Applied Materials & Interfaces


学术兼职

全国自动化系统与集成标准化技术(工业数据)委员会委员

中国机械工程学会生产工程分会模具专业委员会委员


获奖情况

江苏省333”高层次人才培养工程

江苏省“六大人才高峰”高层次人才

江苏省科技进步奖一等奖(7)

江苏省科技进步奖二等奖(3)

威澳门尼斯人网站教学工作优秀一等奖

江苏省教学成果一等奖 (8)

论文著作

2015-2020年以来发表期刊论文

[1] Yan Xing*, Jin Qian, Miguel A.Gosálvez, Jie Zhang, Yunze Zhang. Simulation-based optimization of out-of-plane, variable-height, convoluted quartz micro needle arrays via single-step anisotropic wet etching. Microelectronic Engineering. 2020, 111375  231(15) July 2020; 

[2] Wu, Guorong; Xing, Yan*. The Model of Etch Rates of Crystallographic Planes of Sapphire Based on Step Flow Mechanism. IEEE Journal of Microelectromechanical Systems. 2020 29(5),  1234 -1244;

[3] Chai Qing, Chen Fang, Junyang Hu Yan Xing*, Dongliang Huang.  Cellular Automaton Model for The Simulation of Laser Cladding Profile of Metal Alloys. Materials & Design. 2020, 195;

[4] Chen Fang, Yan Xing,∗, Zaifa Zhou, Qing Chai, Qianhuang Chen. Structural characterization and continuous cellular automata simulation of micro structures by focused Ga ion beam induceddeposition process. Sensors and Actuators A 312 1  (2020) 112150;   

[5] Qianhuang Chen , Tianyang Shao and Yan Xing*. An Experiment-Based Profile Function for the Calculation of Damage Distribution in Bulk Silicon Induced by a Helium Focused Ion Beam Process. Sensors. 2020, 20(8):2306

[6] Huachen Peng, Penghao Dong, Xianqiang Cheng, Chen Zhang, Wencheng Tang *, Yan Xing *, Xin Zhou. Semi-Empirical Prediction of Residual Stress Distributions Introduced by Turning Inconel 718 Alloy Based on Lorentz Function. Materials  2020, 13(19), 4341;

[7] Qiu Xiaoli; Cheng Xianqiang; Dong Penghao; Peng Huachen; Xing Yan; Zhou Xin. Sensitivity Analysis of Johnson-Cook Material Constants and Friction Coefficient Influence on Finite Element Simulation of Turning Inconel 718. Materials 2019; 12(19);

[8] Veerla Swarnalatha, Prem Pal, Ashok Kumar Pandey, Avvaru Venkata Narasimha Rao, Yan Xing, Hiroshi Tanaka, Kazuo Sato. Systematic study of the etching characteristics of Si{111} in modified TMAH. : Volume 15, Issue 1, 15 January 2020, p. 52 – 57 Micro & Nano Letters.

[9] Penghao Dong , Huachen Peng, Xianqiang Cheng, Yan Xing*. Semi-Empirical Prediction of Residual Stress Profiles in Machining IN718 Alloy Using Bimodal Gaussian Curve  Materials 2019, 12, 3864. 

[10] Chen Fang, Qing Chai , Qianhuang Chen and Yan Xing*. Continuous Cellular Automaton Simulation of Focused Ion Beam-induced Deposition for Nano Structures. Nanotechnology. 2020 31 105301.

[11] Yan Xing, Zhiyue Guo, Miguel A. Gosálvez, Guorong Wu, Xiaoli Qiu. Characterization of anisotropic wet etching of single-crystal sapphire, Sensors and Actuators A 286 (2019) .

[12] Yuan Li, Yan Xing*, Chen Fang, Qianhuang Chen, Xiaoli Qiu. An experiment-based method for focused ion beam milling profile calculation and process design. Sensors and Actuators A 286 (2019) 78–90. 

[13] Pei Wang, Qianhuang Chen, Yan Xing(*), Yuan Li, Chen Fang, Xiaoli Qiu. Molecular dynamic simulation of orientation-dependent effect on silicon crystalline during sputtering process of focused ion beam. , Microsystem Technologies, 2019.25: 1413–1422.

[14] Yan Xing*, Miguel A. Gosálvez, Hui Zhang, Yuan Li, The Maximum Positive Curvature Recognition Method to Determine Etch Profiles in Wet Etching of Quartz on AT and BT Cuts, IEEE/ASME Journal of Microelectromechanical Systems. 2018 , 27(4): 730-738.  

[15] Minghui Pan, Wencheng Tang, Yan Xing. Assembly sequence optimization for minimizing the riveting path and overall dimensional error. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 2018, 232(14): 2065-2615.

[16] Ni, Jun; Tang, Wen Cheng, (*) Xing, Yan(*) Performance of reducing the dimensional error of an assembly by the rivet upsetting direction optimization. , proceedings of the institution of mechanical engineers part b-journal of engineering manufacture, 2017.10, 231(12): 2133~2144.   

[17] Yan Xing*, Miguel A. Gosálvez, Hui Zhang, Yuan Li, Xiaoli Qiu. Transient and Stable Profiles During Anisotropic Wet Etching of Quartz, IEEE Journal of Microelectromechanical Systems. 2017 ,26 (5) :1063-1072.

[18] Hui Zhang,Yuan Li,Miguel A. Gosalvez,Xiaoli Qiu,Yan Xing(*).  Kinetic Monte Carlo method for the simulation of anisotropic wet etching of quartz. Sensors & Actuators: A. Physical,2017.02.02,256(1):24~34.

[19] Jun Ni, WC Tang, Y Xing, Kecun Ben, Ming Li. A local-to-global dimensional error calculation framework for the riveted assembly using finite element analysis. ASME Journal of Manufacturing Science and Engineering,  2015. 138(3) 031004.

[20] Zhuang Hui, Y Xing(*) , M A. Gosálvez, P. Pal, K. Sato. Removal probability function for Kinetic Monte Carlo simulations of anisotropic etching of siliconin alkaline etchants containing additives. Sensors and Actuators A: Physical .  2015. 233, (1) Pages 451–459. 

[21] Jun Ni, WC Tang, Y. Xing.  Assembly process optimization for reducing the dimensional error of antenna assembly with abundant rivets, Journal of Intelligent Manufacturing, 2015. 72(11) 1-14. 

[22] Yuan Li, M A. Gosálvez, Prem Pal, K. Sato Y Xing(*). Particle Swarm Optimization-based Continuous Cellular Automaton for the simulation of Deep Reactive Ion Etching Journal of Micromechanics and microengineering. , 2015. 25(5) 055023 SCI.    

[23] P Pal, A Ashok, Y Xing. Anisotropic Etching in Low Concentration KOH: Effects of Surfactant Concentration. Micro & Nano Letters. 2015. 



主要国际会议发表论文(IEEE MEMS conference, IEEE Transducers )


1]Wu, Guorong; Xing, Yan*; Fang, Chen; Yao, Jiabao; Lin, Xiaohui. Atomic Structure Method for the Calculation of Anisotropic Wet Etching Rate of Sapphire Crystal Source: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2020), v 2020-January, p 913-916.

[2]Shao, Tianyang; Chen, Qianhuang; Xing, Yan*; Lin, Xiaohui; Fang, Chen; Chai, Qing. An Experiment Based Damage Profile Function for Focused Helium Ion Beam Process in Fabrication of Micro/Nano Structures. Source: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2020), v 2020-January, p 905-908, MEMS 2020 EI

[3] Fang, Chen; Chen, Qianhuang ; Chai, Qing ; Xing, Yan*; Lin, Xiaohui. Continuous Cellular Automaton Simulation Model of Focused Ion Beam Induced Deposition Process for Micro/Nano Structures. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems  IEEE TRANSDUCERS 2019, p 1607-1610

[4] Xing, Yan*; Guo, Zhiyue; Wu, Guorong; Gosalvez, Miguel A. Characterization of Orientation-Dependent Etching Properties and Surface Morphology of Sapphire Crystal in Wet Etching. :019 20th International Conference on Solid-State Sensors, Actuators and Microsystems  IEEE TRANSDUCERS 2019, p 281-284.

[5] Zhang, Jie ; Xing, Yan* ; Gosalvez, Miguel A ; Qiu, Xiaoli ; Lin, Xiaohui; Zhang, Chibin. Level Set Simulation of Surface Evolution in Anisotropic Wet Etching of Patterned Sapphire Subtrate.  Source: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2019), v 2019-January, p 361-364.

[6] Hui Zhang Jin Zhang; Yuan Li, Yan Xing (*) The microscopic activation energy etching mechanism in anisotropic wet etching of quartz, IEEE 31th International Conference on Micro Electro Mechanical Systems, Belfast, (IEEE MEMS 2018), Belfast, 2018.1.21-2018.1.27 

[7] Yuan Li ;  Hui Zhang; Xiaoli Qiu, Yan Xing* An experiment-based model for focused ion beam simulation and the process design optimization, IEEE 31th International Conference on Micro Electro Mechanical Systems Belfast, (IEEE MEMS 2018), Befast, 2018.1.21-2018.1.27

[8] Y Zhang,J Zhang,Y Xing*,H Zhang, M A Gosalvez. The level set simulation for complex microstructures in quartz wet etching . IEEE International Conference on Solid-state Sensors (IEEE Transducers 17), 2017 :1356-1359.

[9] H Zhang,Y Xing*,J Zhang,M A Gosálvez,Y Li. Evolutionary Kinetic Monte Carlo method for the simulation of anisotropic etching of Z-cut, at-cut and BT-cut quartz. IEEE International Conference on Solid-state Sensors (IEEE Transducers 17), 2017 :1308-1311

[10] X Yan*,Z Hui,PP Cai,L Yuan. The study of self-limited state profile and level set simulation of anisotropic wet etching on quartz.  IEEE 30th International Conference on Micro Electro Mechanical Systems Belfast, (IEEE MEMS 2017),


科研项目

项目名称

项目类别

项目时间

工作类别

项目金额

具有器件级、工艺级、系统级设计功能的微纳传感器综合设计工具开发

重点研发计划课题 子课题

2019-2022

承担

36

氮化镓微纳结构各向异性湿法刻蚀工艺机理与界面演化模型研究

国家自然科学基金

2019-2022

承担

60

IV低排放柴油机进气系统核心部件智能产线研发

南京市科技局

2018-2019

承担

25

IV低排放采油机进气系统核心部件研发

江苏省科技厅,重大科技成果转化

2016-2019

承担

120

微创介入手术导丝加工装备设计及性能测试装置

企业横向

2019-2021

承担

55

汽车电子产品自动装配工艺装备设计与系统研发

企业横向

2018-2021

承担

85

汽车换挡器自动装配线生产管理系统研发

企业横向

2019-2020

承担

15

数字化探究实验数据采集分析系统软件研发

企业横向

2018-2019

承担

10

三维复杂曲面钣金激光切割智能制造关键技术研究

江苏省前瞻性联合研究项目

2015-2017

承担

20

航空钛合金钣金件热成形工艺方法

基础科研 中航工业

2011-2015

承担

100

聚焦离子束气体辅助刻蚀工艺机理与界面演化模拟方法研究

国家自然科学基金

2014-2017

承担

80

适形各向异性湿法腐蚀工艺中表面活性剂的吸附机制与模型研究

国家自然科学基金

2010-2013

承担

36

MEMS多物理场耦合分析设计平台及应用产品开发与产业化

江苏省科技厅,重大成果转化项目

2009-2011

承担

35

MEMS工艺平台研究

江苏省六大人才高峰

2011-2012

承担

6

薄壁件复杂电子产品结构装配工艺

中电集团 基础科研

2011-2015

参与

180


专利